1. Department of Chemistry 2. Department of Electrical Engineering
Abstract:
Inductively Coupled Plasma (ICP) sources are of great importance for wide range of applications, including but not limited to micro and nano fabrication, chemical analysis, and plasma processing. Portable and battery-operated instruments can be developed using a miniaturized micro ICP chip considering the low-power and low-voltage requirement of micro ICPs. To the best of author’s knowledge, this is the first report for generation of a micro ICP on a chip with size of nearly 1 mm using a planar coil with diameter of 800 µm. A novel method for chemical analysis on Mars is presented using miniaturized carbon dioxide inductively coupled plasma optical emission spectroscopy (miniaturized-ICP-OES). Importantly, the conditions of the Martian atmosphere allow for plasma generation without the need for a gas tank and vacuum pump to operate the device. The generation and characterization of miniaturized ICP sources under conditions mimicking the atmosphere of Mars were studied. Circuit design considerations for miniaturized ICP generation are also investigated. The background emission spectrum of a miniaturized carbon dioxide ICP showed an interference-free spectrum from 420 to 900 nm, making it favorable for chemical analysis in the visible region. The feasibility of chemical analysis was examined by introducing ethylene, neon, and hydrogen while monitoring the peaks at 431, 585, and 656 nm, respectively. This method enables the future development of a chemical analyzer for Mars missions with equipment sizes comparable to that of a matchbox, operating at power of 2 - 10 W with the lifetime of several months.
Novelty of this Contribution:
Development of a Miniature Inductively coupled plasma Spectroscopy for Detection of Trace Molecular Species on Mars.
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